Electron and ion beams are widely used for both qualitative and quantitative analysis of semiconductor materials and devices. They can be used to image structures with sub-nm resolution and to provide information about elemental composition and dopant concentration. This course describes the fundamentals of electron and ion beam characterization and includes a project that analyzes the surface roughness of a solar cell.
Electron and Ion Beam Characterization
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Electron and Ion Beam Characterization
This course is part of Semiconductor Characterization Specialization
Instructor: Trevor Thornton
Included with 
Gain insight into a topic and learn the fundamentals.
Intermediate level
Recommended experience
4 hours to complete
3 weeks at 1 hour a week
Flexible schedule
Learn at your own pace
What you'll learn
Explain the interaction of electron and ion beams with semiconductor materials.
Describe the constituent components of electron and ion beam characterization systems.
Describe applications of electron and ion beam characterization.
Skills you'll gain
Details to know
Shareable certificate
Add to your LinkedIn profile
Assessments
5 assignments
Taught in English
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This course is part of the Semiconductor Characterization Specialization
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There are 5 modules in this course
Electron and ion beams are widely used for both qualitative and quantitative analysis of semiconductor materials and devices. They can be used to image structures with sub-nm resolution and to provide information about elemental composition and dopant concentration. This course describes the fundamentals of electron and ion beam characterization and includes a project that analyzes the surface roughness of a solar cell.
What's included
1 video2 readings
This week introduces the concepts of scanning electron microscopy and how it is used for both qualitative and quantitative sample analysis.
What's included
2 videos1 reading1 assignment
This week, you will learn about Auger electron emission spectroscopy, a powerful technique for surface analysis.
What's included
3 videos1 reading1 assignment
This week, you will learn about secondary ion mass spectroscopy and how it is used to measure the concentration and distribution of constituent materials in semiconductors.
What's included
2 videos1 reading1 assignment
This week, you will complete a case study to assess your ability to use images obtained from an SEM for quantitative surface analysis.
What's included
1 video2 assignments
Instructor
Offered by
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École Polytechnique Fédérale de Lausanne
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Arizona State University
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