Arizona State University
Electron and Ion Beam Characterization
Arizona State University

Electron and Ion Beam Characterization

Trevor Thornton

Instructor: Trevor Thornton

Included with Coursera Plus

Gain insight into a topic and learn the fundamentals.
4.8

(10 reviews)

Intermediate level

Recommended experience

4 hours to complete
3 weeks at 1 hour a week
Flexible schedule
Learn at your own pace
Gain insight into a topic and learn the fundamentals.
4.8

(10 reviews)

Intermediate level

Recommended experience

4 hours to complete
3 weeks at 1 hour a week
Flexible schedule
Learn at your own pace

What you'll learn

  • Explain the interaction of electron and ion beams with semiconductor materials.

  • Describe the constituent components of electron and ion beam characterization systems.

  • Describe applications of electron and ion beam characterization.

Details to know

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Assessments

5 assignments

Taught in English

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This course is part of the Semiconductor Characterization Specialization
When you enroll in this course, you'll also be enrolled in this Specialization.
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There are 5 modules in this course

Electron and ion beams are widely used for both qualitative and quantitative analysis of semiconductor materials and devices. They can be used to image structures with sub-nm resolution and to provide information about elemental composition and dopant concentration. This course describes the fundamentals of electron and ion beam characterization and includes a project that analyzes the surface roughness of a solar cell.

What's included

1 video2 readings

This week introduces the concepts of scanning electron microscopy and how it is used for both qualitative and quantitative sample analysis.

What's included

2 videos1 reading1 assignment

This week, you will learn about Auger electron emission spectroscopy, a powerful technique for surface analysis.

What's included

3 videos1 reading1 assignment

This week, you will learn about secondary ion mass spectroscopy and how it is used to measure the concentration and distribution of constituent materials in semiconductors.

What's included

2 videos1 reading1 assignment

This week, you will complete a case study to assess your ability to use images obtained from an SEM for quantitative surface analysis.

What's included

1 video2 assignments

Instructor

Trevor Thornton
Arizona State University
5 Courses2,782 learners

Offered by

Recommended if you're interested in Mechanical Engineering

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